Standard Number | BS EN ISO 14644-8:2013 |
Title | Cleanrooms and associated controlled environments. Classification of air cleanliness by chemical concentration (ACC) |
Status | Current, Under review |
Publication Date | 28 February 2013 |
Cross References | ISO 14644-6, ISO 14644-4:2001, ISO 14644-5:2004, ISO 14644-7:2004, ISO 14698, SEMI F21-1102, IEST-G-CC035.1, ASTM D5127-99, JACA No. 34-:2000, JACA No. 35A-2003, JACA No. 43-2006, SEMI E108-0307, IEST-RP-CC031.2, IDEMA Standard M11-99, JIS B9917-8:2010, SEMI E45-1101, SEMI E460307 |
Replaces | BS EN ISO 14644-8:2006 |
International Relationships | EN ISO 14644-8:2013,ISO 14644-8:2013 |
Draft Superseded By | 11/30248115 DC |
Descriptors | Environmental cleanliness, Classification systems, Environment (working), Sampling methods, Verification, Concentration, Designations, Chemical analysis and testing, Air pollution, Contamination, Clean rooms, Air, Molecules, Test equipment |
ICS | 13.040.35
|
Title in French | Salles propres et environnements maîtrisés apparentés. Classification de la propreté chimique de l'air |
Title in German | Reinräume und zugehörige Reinraumbereiche. Klassifizierung der Luftreinheit anhand der Chemikalienkonzentration (ACC) |
Committee | LBI/30 |
ISBN | 978 0 580 75693 1 |
Publisher | BSI |
Format | A4 |
Delivery | Yes |
Pages | 32 |
File Size | 1.037 MB |
Price | £206.00 |