BS ISO 14701:2018 - TC - Tracked Changes. Surface chemical analysis. X-ray photoelectron spectroscopy. Measurement of silicon oxide thickness

BS ISO 14701:2018 - TC

Tracked Changes. Surface chemical analysis. X-ray photoelectron spectroscopy. Measurement of silicon oxide thickness

Status : Current   Published : February 2020

Format
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Standard NumberBS ISO 14701:2018 - TC
TitleTracked Changes. Surface chemical analysis. X-ray photoelectron spectroscopy. Measurement of silicon oxide thickness
StatusCurrent
Publication Date27 February 2020
Normative References(Required to achieve compliance to this standard)ISO 18115-1
Informative References(Provided for Information)ISO/TR 18392, ISO/IEC Guide 98-3:2008, GUM:1995, ISO 18116
DescriptorsChemical analysis and testing, Surface properties, Surface chemistry, Electron emission, Silicon, X-ray photoelectron spectroscopy, Thickness measurement, Spectroscopy, Oxides, Photoelectron spectroscopy
ICS71.040.40
CommitteeCII/60
ISBN978 0 539 11820 9
PublisherBSI
FormatA4
DeliveryYes
Pages54
File Size2.93 MB
Price£262.00


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