19/30399949 DC - BS ISO 16531. Surface chemical analysis. Depth profiling. Methods for ion beam alignment and the associated measurement of current or current density for depth profiling in AES and XPS

19/30399949 DC

BS ISO 16531. Surface chemical analysis. Depth profiling. Methods for ion beam alignment and the associated measurement of current or current density for depth profiling in AES and XPS

Status : Current, Draft for public comment   Published : October 2019

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This International Standard specifies methods for the alignment of the ion beam to ensure good depth resolution in sputter depth profiling and optimal cleaning of surfaces when using inert gas ions in Auger electron spectroscopy and X-ray photoelectron spectroscopy. These methods are of two types: one involves a Faraday cup to measure the ion current; the other involves imaging methods. The Faraday cup method also specifies the measurements of current density and current distributions in ion beams. The methods are applicable for ion guns with beams with a spot size below ~1 mm in diameter. The methods do not include depth resolution optimization.




Standard Number19/30399949 DC
TitleBS ISO 16531. Surface chemical analysis. Depth profiling. Methods for ion beam alignment and the associated measurement of current or current density for depth profiling in AES and XPS
StatusCurrent, Draft for public comment
Publication Date29 October 2019
Normative References(Required to achieve compliance to this standard)ISO 18115-1
Informative References(Provided for Information)ISO 14606:2000
International RelationshipsISO/DIS 16531
Draft Expiry Date22 December 2019
DescriptorsSurfaces, Glow discharges, Quantitative analysis, Mass, Chemical composition, Thickness, Chemical analysis and testing, Spectroscopy, Optical measurement, Surface chemistry
ICS71.040.40
Title in FrenchAnalyse chimique des surfaces — Profilage d'épaisseur — Méthodes d'alignement du faisceau d'ions et la mesure associée de densité de courant ou de courant pour le profilage d'épaisseur en AES et XPS
CommitteeCII/60
PublisherBSI
FormatA4
DeliveryYes
Pages25
File Size2.155 MB
NotesWarning: this draft is not current beyond its expiry date for comments.
Price£20.00


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