ASTM E983 - 19 - Standard Guide for Minimizing Unwanted Electron Beam Effects in Auger Electron Spectroscopy

ASTM E983 - 19

Standard Guide for Minimizing Unwanted Electron Beam Effects in Auger Electron Spectroscopy

Status : Current   Published : April 2019

Format
PDF

Format
HARDCOPY



1.1 This guide outlines the origins and manifestations of unwanted electron beam effects in Auger electron spectroscopy (AES).

1.2 Some general guidelines are provided concerning the electron beam parameters which are most likely to produce these effects and suggestions are offered on how to minimize them.

1.3 General classes of materials are identified which are most likely to exhibit unwanted electron beam effects. In addition, a tabulation of some specific materials which have been observed to undergo electron damage effects is provided.

1.4 A simple method is outlined for establishing the existence and extent of these effects during routine AES analysis.

1.5 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.

1.6  This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.

1.7  This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.




Standard NumberASTM E983 - 19
TitleStandard Guide for Minimizing Unwanted Electron Beam Effects in Auger Electron Spectroscopy
StatusCurrent
Publication Date01 April 2019
Normative References(Required to achieve compliance to this standard)No other standards are normatively referenced
Informative References(Provided for Information)No other standards are informatively referenced
Descriptors Auger electron spectroscopy, charging, electron beam, electron beam damage
ICS17.180.30
PublisherASTM
FormatA4
DeliveryYes
Pages5
File Size91 KB
Price£40.00


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