ASTM D5127 - 13(2018) - Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries

ASTM D5127 - 13(2018)

Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries

Status : Current   Published : October 2018

Format
PDF

Format
HARDCOPY



1.1 This guide provides recommendations for water quality related to electronics and semiconductor-industry manufacturing. Seven classifications of water are described, including water for line widths as low as 0.032 μm. In all cases, the recommendations are for water at the point of distribution (POD).

1.2 Water is used for washing and rinsing of semiconductor components during manufacture. Water is also used for cleaning and etching operations, making steam for oxidation of silicon surfaces, preparing photomasks, and depositing luminescent materials. Other applications are in the development and fabrication of solid-state devices, thin-film devices, communication lasers, light-emitting diodes, photo-detectors, printed circuits, memory devices, vacuum-tube devices, or electrolytic devices.

1.3 Users needing water qualities different from those described here should consult other water standards, such as Specification D1193 and Guide D5196.

1.4  This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.

1.5  This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.




Standard NumberASTM D5127 - 13(2018)
TitleStandard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries
StatusCurrent
Publication Date15 October 2018
Normative References(Required to achieve compliance to this standard)No other standards are normatively referenced
Informative References(Provided for Information)No other standards are informatively referenced
Descriptors electronic, microelectronics, semiconductor, ultra-pure water
ICS13.060.25
71.100.99
PublisherASTM
FormatA4
DeliveryYes
Pages6
File Size98 KB
Price£40.00


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