ASTM E2444 - 11(2018) - Standard Terminology Relating to Measurements Taken on Thin, Reflecting Films

ASTM E2444 - 11(2018)

Standard Terminology Relating to Measurements Taken on Thin, Reflecting Films

Status : Current   Published : May 2018

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PDF

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HARDCOPY



1.1 This standard consists of terms and definitions pertaining to measurements taken on thin, reflecting films, such as found in microelectromechanical systems (MEMS) materials. In particular, the terms are related to the standards in Section 2, which were generated by Committee E08 on Fatigue and Fracture. Terminology E1823 Relating to Fatigue and Fracture Testing is applicable to this standard.

1.2 The terms are listed in alphabetical order.

1.3  This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.




Standard NumberASTM E2444 - 11(2018)
TitleStandard Terminology Relating to Measurements Taken on Thin, Reflecting Films
StatusCurrent
Publication Date01 May 2018
Normative References(Required to achieve compliance to this standard)No other standards are normatively referenced
Informative References(Provided for Information)No other standards are informatively referenced
Descriptors Cantilevers, definitions, fixed-fixed beams, interferometry, length measurements, microelectromechanical systems, MEMS, polysilicon, residual strain, stiction, strain gradient, terminology, test structure
ICS01.040.31
PublisherASTM
FormatA4
DeliveryYes
Pages2
File Size72 KB
Price£36.00


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