BS ISO 13067:2020 - Microbeam analysis. Electron backscatter diffraction. Measurement of average grain size

BS ISO 13067:2020

Microbeam analysis. Electron backscatter diffraction. Measurement of average grain size

Status : Current   Published : July 2020



This document describes procedures for measuring average grain size derived from a two-dimensional polished cross-section using electron backscatter diffraction (EBSD). This requires the measurement of orientation, misorientation and pattern quality factor as a function of position in the crystalline specimen[1]. The measurements in this document are made on two dimensional sections. The reader should note carefully the definitions used (3.3) which draw a distinction between the measured sectional grain sizes, and the mean grain size which can be derived from them that relates to the three dimensional grain size.


While conventional methods for grain size determination using optical microscopy are well-established, EBSD methods offer a number of advantages over these techniques, including increased spatial resolution and quantitative description of the orientation of the grains.


The method also lends itself to the measurement of the grain size of complex materials, for example those with a significant duplex content.


The reader is warned to interpret the results with care when attempting to investigate specimens with high levels of deformation.

Standard NumberBS ISO 13067:2020
TitleMicrobeam analysis. Electron backscatter diffraction. Measurement of average grain size
Publication Date17 July 2020
Normative References(Required to achieve compliance to this standard)ISO/IEC 17025, ISO 23833, ISO 24173, ISO 16700
Informative References(Provided for Information)ISO 21748, ASTM E930, ASTM E112, ASTM E1382, ASTM E1181, ISO 13383-1
ReplacesBS ISO 13067:2011
International RelationshipsISO 13067:2020
Draft Superseded By19/30365236 DC
DescriptorsChemical analysis and testing, Crystal microstructure, Microanalysis, Measurement, Particle size distribution, Electron diffraction, Electron optics, Spectroscopy, Electron beams, Grain size
Title in FrenchAnalyse par microfaisceaux. Diffraction d'électrons rétrodiffusés. Mesurage de la taille moyenne des grains
ISBN978 0 580 51101 1
File Size2.257 MB

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