BS IEC 62047-36:2019 Semiconductor devices. Micro-electromechanical devices. Environmental and dielectric withstand test methods for MEMS piezoelectric thin films

BS IEC 62047-36:2019

Semiconductor devices. Micro-electromechanical devices. Environmental and dielectric withstand test methods for MEMS piezoelectric thin films

Status : Current   Published : April 2019

Format
PDF

Format
HARDCOPY



What is this standard about?

This part of IEC 62047 specifies test methods for evaluating the durability of MEMS piezoelectric thin film materials under the environmental stress of temperature and humidity and under electrical stress, and test conditions for appropriate quality assessment. Specifically, this document specifies test methods and test conditions for measuring the durability of a DUT under temperature and humidity conditions and applied voltages. It further applies to evaluations of converse piezoelectric properties in piezoelectric thin films formed primarily on silicon substrates, i.e., piezoelectric thin films used as actuators.

This document does not cover reliability assessments, such as methods of predicting the lifetime of a piezoelectric thin film based on a Weibull distribution.




Standard NumberBS IEC 62047-36:2019
TitleSemiconductor devices. Micro-electromechanical devices. Environmental and dielectric withstand test methods for MEMS piezoelectric thin films
StatusCurrent
Publication Date24 April 2019
Normative References(Required to achieve compliance to this standard)IEC 60068-2-14:2009, IEC 62047-30
Informative References(Provided for Information)IEC 60384-1:2016
International RelationshipsIEC 62047-36:2019
Draft Superseded By17/30363044 DC
DescriptorsSemiconductor devices, Vocabulary, Electronic equipment and components, Semiconductor technology, Integrated circuits, Terminology, Electromechanical devices
ICS31.080.99
31.140
CommitteeEPL/47
ISBN978 0 580 99118 9
PublisherBSI
FormatA4
DeliveryYes
Pages20
File Size1.016 MB
Price£130.00


 Your basket
Your basket is empty

Multi-user access to over 3,500 medical device standards, regulations, expert commentaries and other documents


Develop a PAS

Develop a fast-track standardization document in 9-12 months


Worldwide Standards
We can source any standard from anywhere in the world


BSOL

The faster, easier way to work with standards