ASTM E986 - 04(2017) - Standard Practice for Scanning Electron Microscope Beam Size Characterization

ASTM E986 - 04(2017)

Standard Practice for Scanning Electron Microscope Beam Size Characterization

Status : Current   Published : June 2017

Format
PDF

Format
HARDCOPY



1.1 This practice provides a reproducible means by which one aspect of the performance of a scanning electron microscope (SEM) may be characterized. The resolution of an SEM depends on many factors, some of which are electron beam voltage and current, lens aberrations, contrast in the specimen, and operator-instrument-material interaction. However, the resolution for any set of conditions is limited by the size of the electron beam. This size can be quantified through the measurement of an effective apparent edge sharpness for a number of materials, two of which are suggested. This practice requires an SEM with the capability to perform line-scan traces, for example, Y-deflection waveform generation, for the suggested materials. The range of SEM magnification at which this practice is of utility is from 1000 to 50 000 × . Higher magnifications may be attempted, but difficulty in making precise measurements can be expected.

1.2  This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

1.3  This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.




Standard NumberASTM E986 - 04(2017)
TitleStandard Practice for Scanning Electron Microscope Beam Size Characterization
StatusCurrent
Publication Date01 June 2017
Normative References(Required to achieve compliance to this standard)No other standards are normatively referenced
Informative References(Provided for Information)No other standards are informatively referenced
Descriptors Electron beam size, E766, Graphite fiber, Magnification, NIST–SRM 2069B, Resolution, SEM, SEM performance, Spot size, Waveform
ICS31.120
PublisherASTM
FormatA4
DeliveryYes
Pages3
File Size124 KB
Price£36.00


 Your basket
Your basket is empty

Multi-user access to over 3,500 medical device standards, regulations, expert commentaries and other documents


Worldwide Standards
We can source any standard from anywhere in the world


Develop a PAS

Develop a fast-track standardization document in 9-12 months


BSOL

The faster, easier way to work with standards