BS ISO 22415:2019 Surface chemical analysis. Secondary ion mass spectrometry. Method for determining yield volume in argon cluster sputter depth profiling of organic materials

BS ISO 22415:2019

Surface chemical analysis. Secondary ion mass spectrometry. Method for determining yield volume in argon cluster sputter depth profiling of organic materials

Status : Current   Published : May 2019

Format
PDF

Format
HARDCOPY



What is this standard about?

This document specifies a method for measuring and reporting argon cluster sputtering yield volumes of a specific organic material. The method requires one or more test samples of the specified material as a thin, uniform film of known thickness between 50 and 1 000 nanometres on a flat substrate which has a different chemical composition to the specified material. This document is applicable to test samples in which the specified material layer has homogeneous composition in depth and is not applicable if the depth distribution of compounds in the specified material is inhomogeneous. This document is applicable to instruments in which the sputtering ion beam irradiates the sample using a raster to ensure a constant ion dose over the analysis area.




Standard NumberBS ISO 22415:2019
TitleSurface chemical analysis. Secondary ion mass spectrometry. Method for determining yield volume in argon cluster sputter depth profiling of organic materials
StatusCurrent
Publication Date14 May 2019
Normative References(Required to achieve compliance to this standard)ISO 18115-1:2013
Informative References(Provided for Information)ISO/TR 15969, ASTM E 1438
International RelationshipsISO 22415:2019
Draft Superseded By18/30362138 DC
DescriptorsSurface properties, Surfaces, Chemical analysis and testing, Vocabulary, Definitions, Spectroscopy
ICS71.040.40
Title in FrenchAnalyse chimique des surfaces. Spectrométrie de masse des ions secondaires. Méthode de détermination du rendement volumique dans le cadre du profilage en profondeur de matériaux organiques par pulvérisation d'argon en grappe
CommitteeCII/60
ISBN978 0 580 98908 7
PublisherBSI
FormatA4
DeliveryYes
Pages38
File Size2.327 MB
Price£214.00


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