BS ISO 13084:2018 Surface chemical analysis. Secondary ion mass spectrometry. Calibration of the mass scale for a time-of-flight secondary ion mass spectrometer

BS ISO 13084:2018

Surface chemical analysis. Secondary ion mass spectrometry. Calibration of the mass scale for a time-of-flight secondary ion mass spectrometer

Status : Current   Published : November 2018

Format
PDF

Format
HARDCOPY



What is this standard about?

This document specifies a method to optimize the mass calibration accuracy in time-of-flight secondary ion mass spectrometry (SIMS) instruments used for general analytical purposes. It is only applicable to time-of-flight instruments but is not restricted to any particular instrument design. Guidance is provided for some of the instrumental parameters that can be optimized using this procedure and the types of generic peaks suitable to calibrate the mass scale for optimum mass accuracy




Standard NumberBS ISO 13084:2018
TitleSurface chemical analysis. Secondary ion mass spectrometry. Calibration of the mass scale for a time-of-flight secondary ion mass spectrometer
StatusCurrent
Publication Date16 November 2018
Normative References(Required to achieve compliance to this standard)No other standards are normatively referenced
Informative References(Provided for Information)ISO 18115-1, ISO 23830
ReplacesBS ISO 13084:2011
International RelationshipsISO 13084:2018
Draft Superseded By17/30356000 DC
DescriptorsMass spectrometry, Chemical analysis and testing, Ions, Surface chemistry, Control samples, Secondary, Surfaces, Mass spectrometers, Calibration
ICS71.040.40
Title in FrenchAnalyse chimique des surfaces. Spectrométrie de masse des ions secondaires. Étalonnage de l'échelle de masse pour un spectromètre de masse des ions secondaires à temps de vol
CommitteeCII/60
ISBN978 0 580 97455 7
PublisherBSI
FormatA4
DeliveryYes
Pages24
File Size909 KB
Price£182.00


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