BS IEC 62047-34:2019 Semiconductor devices. Micro-electromechanical devices. Test methods for MEMS piezoresistive pressure-sensitive device on wafer

BS IEC 62047-34:2019

Semiconductor devices. Micro-electromechanical devices. Test methods for MEMS piezoresistive pressure-sensitive device on wafer

Status : Current   Published : April 2019

Format
PDF

Format
HARDCOPY



What is this standard about?

This part of IEC 62047 describes test conditions and test methods of electric character, static performances and thermal performances for MEMS pressure-sensitive devices. This document applies to test for both open and closed loop piezoresistive MEMS pressure devices on wafer.




Standard NumberBS IEC 62047-34:2019
TitleSemiconductor devices. Micro-electromechanical devices. Test methods for MEMS piezoresistive pressure-sensitive device on wafer
StatusCurrent
Publication Date16 April 2019
Normative References(Required to achieve compliance to this standard)IEC 60747-14-3, IEC 61193-2
Informative References(Provided for Information)ISO/IEC Guide 98-3
International RelationshipsIEC 62047-34:2019
Draft Superseded By17/30355776 DC
DescriptorsIntegrated circuits, Semiconductor devices, Electronic equipment and components, Vocabulary, Terminology, Semiconductor technology, Electromechanical devices
ICS31.080.99
31.140
CommitteeEPL/47
ISBN978 0 580 97391 8
PublisherBSI
FormatA4
DeliveryYes
Pages20
File Size0.9824 MB
Price£130.00


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