BS IEC 62047-32:2019 Semiconductor devices. Micro-electromechanical devices. Test method for the nonlinear vibration of MEMS resonators

BS IEC 62047-32:2019

Semiconductor devices. Micro-electromechanical devices. Test method for the nonlinear vibration of MEMS resonators

Status : Current   Published : January 2019

Format
PDF

Format
HARDCOPY



What is this standard about?

This part of IEC 62047 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS resonators.




Standard NumberBS IEC 62047-32:2019
TitleSemiconductor devices. Micro-electromechanical devices. Test method for the nonlinear vibration of MEMS resonators
StatusCurrent
Publication Date29 January 2019
Normative References(Required to achieve compliance to this standard)IEC 62047-1
Informative References(Provided for Information)No other standards are informatively referenced
International RelationshipsIEC 62047-32:2019
Draft Superseded By17/30355768 DC
DescriptorsTerminology, Semiconductor devices, Vocabulary, Semiconductor technology, Electromechanical devices, Electronic equipment and components, Integrated circuits
ICS31.080.99
Title in FrenchDispositifs à semiconducteurs. Dispositifs microélectromécaniques Méthode d’essai pour la vibration non linéaire des résonateurs MEMS
CommitteeEPL/47
ISBN978 0 580 97389 5
PublisherBSI
FormatA4
DeliveryYes
Pages22
File Size1.107 MB
Price£130.00


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