20/30349837 DC - BS ISO 21820. Fine ceramics (advanced ceramics, advanced technical ceramics). Ultraviolet photoluminescence image test method for analyzing polytypes of boron and nitrogen doped SiC crystals

20/30349837 DC

BS ISO 21820. Fine ceramics (advanced ceramics, advanced technical ceramics). Ultraviolet photoluminescence image test method for analyzing polytypes of boron and nitrogen doped SiC crystals

Status : Current, Draft for public comment   Published : April 2020

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This document specifies the testing method to determine the polytypes and their ratio in silicon carbide (SiC) wafers or bulk crystals using ultraviolet photoluminescence (UVPL) image test method. The range of SiC is limited to semiconductor SiC into which nitrogen and boron are doped to have the deep acceptor level and the shallow donor level, respectively. The SiC wafers or bulk crystals in this document typically show electrical resistivities ranging 10-2 ~ 10-3 ohm- cm, applicable to power electronic devices.

SiC to which this method is applicable: The silicon carbide (SiC) crystal of 4H, 6H and 15R polytypes, containing boron and nitrogen as acceptor and donor, respectively, at the concentrations generating Donor-Acceptor pairs to cause the UVPL . The boron and nitrogen concentration are typically 1016 and 1018 cm-3 order, respectively, in 4H SiC. When the sample is an epitaxial wafer, it should have the epitaxial layer thickness sufficiently larger than the laser penetration depth, in addition to having the boron and nitrogen dopants at the necessary concentrations. Semi-insulating SiC is not applicable, because it usually contains quite little boron and nitrogen for achieving the very high electrical resistivity.




Standard Number20/30349837 DC
TitleBS ISO 21820. Fine ceramics (advanced ceramics, advanced technical ceramics). Ultraviolet photoluminescence image test method for analyzing polytypes of boron and nitrogen doped SiC crystals
StatusCurrent, Draft for public comment
Publication Date10 April 2020
Normative References(Required to achieve compliance to this standard)ISO 11664-1:2007, ISO 11664-3:2012, ISO 11664-2:2007, ISO 17514:2004, ASTM F358 - 83(1996)
Informative References(Provided for Information)No other standards are informatively referenced
International RelationshipsISO/DIS 21820
Draft Expiry Date03 June 2020
DescriptorsTest specimens, Test methods, Special ceramics, Ceramics, Bond strength
ICS81.060.30
Title in FrenchTitre manque
CommitteeRPI/13
PublisherBSI
FormatA4
DeliveryYes
Pages33
File Size2.057 MB
NotesWarning: this draft is not current beyond its expiry date for comments.
Price£20.00


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