ASTM D5544 - 16 - Standard Test Method for On-Line Measurement of Residue After Evaporation of High-Purity Water

ASTM D5544 - 16

Standard Test Method for On-Line Measurement of Residue After Evaporation of High-Purity Water

Status : Current   Published : June 2016

Format
PDF

Format
HARDCOPY



1.1 This test method covers the determination of dissolved organic and inorganic matter and colloidal material found in high-purity water used in the semiconductor, and related industries. This material is referred to as residue after evaporation (RAE). The range of the test method is from 0.001 μg/L (ppb) to 60 μg/L (ppb).

1.2 This test method uses a continuous, real time monitoring technique to measure the concentration of RAE. A pressurized sample of high-purity water is supplied to the test method's apparatus continuously through ultra-clean fittings and tubing. Contaminants from the atmosphere are therefore prevented from entering the sample. General information on the test method and a literature review on the continuous measurement of RAE has been published. 2

1.3 The values stated in SI units are to be regarded as standard. The values given in parentheses are mathematical conversions to inch-pound units that are provided for information only and are not considered standard.

1.4  This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. For specific hazards statements, see Section 8.




Standard NumberASTM D5544 - 16
TitleStandard Test Method for On-Line Measurement of Residue After Evaporation of High-Purity Water
StatusCurrent
Publication Date01 June 2016
Normative References(Required to achieve compliance to this standard)No other standards are normatively referenced
Informative References(Provided for Information)No other standards are informatively referenced
Descriptors High-purity water, Nonvolatile residue, Residue after evaporation
ICS71.040.40
PublisherASTM
FormatA4
DeliveryYes
Pages9
File Size326 KB
Price£40.00


 Your basket
Your basket is empty

Multi-user access to over 3,500 medical device standards, regulations, expert commentaries and other documents


BSOL

The faster, easier way to work with standards


Develop a PAS

Develop a fast-track standardization document in 9-12 months


Tracked Changes

Understand the changes made to a standard with our new Tracked Changes version