BS IEC 62047-29:2017 - Semiconductor devices. Micro-electromechanical devices. Electromechanical relaxation test method for freestanding conductive thin-films under room temperature

BS IEC 62047-29:2017

Semiconductor devices. Micro-electromechanical devices. Electromechanical relaxation test method for freestanding conductive thin-films under room temperature

Status : Current   Published : March 2018

Format
PDF

Format
HARDCOPY



IEC 62047-29:2017(E) specifies a relaxation test method for measuring electromechanical properties of freestanding conductive thin films for micro-electromechanical systems (MEMS) under controlled strain and room temperature. Freestanding thin films of conductive materials are extensively utilized in MEMS, opto-electronics, and flexible/wearable electronics products. Freestanding thin films in the products experience external and internal stresses which could be relaxed even under room temperature during a period of operation, and this relaxation leads to time-dependent variation of electrical performances of the products. This test method is valid for isotropic, homogeneous, and linearly viscoelastic materials.




Standard NumberBS IEC 62047-29:2017
TitleSemiconductor devices. Micro-electromechanical devices. Electromechanical relaxation test method for freestanding conductive thin-films under room temperature
StatusCurrent
Publication Date15 March 2018
Normative References(Required to achieve compliance to this standard)IEC 62047-2:2006, IEC 62047-3:2006, IEC 62047-21:2014, IEC 62047-22:2014, IEC 62047-8:2011
Informative References(Provided for Information)No other standards are informatively referenced
International RelationshipsIEC 62047-29:2017
Draft Superseded By16/30340354 DC
DescriptorsAnalysis, Test methods, Electromechanical devices, Semiconductor devices, Thin films
ICS31.080.01
31.080.99
CommitteeEPL/47
ISBN978 0 580 94013 2
PublisherBSI
FormatA4
DeliveryYes
Pages16
File Size1.652 MB
Price£130.00


 Your basket
Your basket is empty

Multi-user access to over 3,500 medical device standards, regulations, expert commentaries and other documents


Develop a PAS

Develop a fast-track standardization document in 9-12 months


BSOL

The faster, easier way to work with standards


Tracked Changes

Understand the changes made to a standard with our new Tracked Changes version