ASTM E1127 - 08(2015) - Standard Guide for Depth Profiling in Auger Electron Spectroscopy

ASTM E1127 - 08(2015)

Standard Guide for Depth Profiling in Auger Electron Spectroscopy

Status : Current   Published : January 2015



1.1 This guide covers procedures used for depth profiling in Auger electron spectroscopy.

1.2 Guidelines are given for depth profiling by the following:

[This table has been removed.]

1.3 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.

1.4  This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Standard NumberASTM E1127 - 08(2015)
TitleStandard Guide for Depth Profiling in Auger Electron Spectroscopy
Publication Date06 January 2015
Normative References(Required to achieve compliance to this standard)No other standards are normatively referenced
Informative References(Provided for Information)No other standards are informatively referenced
Descriptors Angle lapping, Angle-resolved AES, Auger electron spectroscopy, Ball cratering, Compositional depth profiling, Cross sectioning, Depth profiling, Depth resolution, Sputter depth profiling, Sputtering, Thin films
File Size116 KB

 Your basket
Your basket is empty

Multi-user access to over 3,500 medical device standards, regulations, expert commentaries and other documents

Tracked Changes

Understand the changes made to a standard with our new Tracked Changes version

Develop a PAS

Develop a fast-track standardization document in 9-12 months


Access, view and download standards with multiple user access, across multiple sites with BSOL