BS EN 62276:2016 - Single crystal wafers for surface acoustic wave (SAW) device applications. Specifications and measuring methods

BS EN 62276:2016

Single crystal wafers for surface acoustic wave (SAW) device applications. Specifications and measuring methods

Status : Current   Published : December 2016

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IEC 62276:2016 applies to the manufacture of synthetic quartz, lithium niobate (LN), lithium tantalate (LT), lithium tetraborate (LBO), and lanthanum gallium silicate (LGS) single crystal wafers intended for use as substrates in the manufacture of surface acoustic wave (SAW) filters and resonators. This edition includes the following significant technical changes with respect to the previous edition:


- Corrections of Euler angle indications in Table 1 and axis directions in Figure 3.


- Definition of "twin" is not explained clearly enough in 3.3.3. Therefore it is revised by a more detailed definition.


- Etch channels maximum number at quartz wafer of seed which do not pass through from surface to back surface are classified for three grades in 4.2.13 a). Users use seed portions of quartz wafers for devices. They request quartz wafers with less etch channels in seeds to reduce defects of devices. The classification of etch channels in seed may prompt a rise in quartz wafer quality.




Standard NumberBS EN 62276:2016
TitleSingle crystal wafers for surface acoustic wave (SAW) device applications. Specifications and measuring methods
StatusCurrent
Publication Date31 December 2016
Normative References(Required to achieve compliance to this standard)EN 60758:2016, ISO 2859-1:1989
Informative References(Provided for Information)SEMI M1-1296, IEC 60862-2, EN 61019-1, EN 61019-3, IEC 61019-1, ASTM F533, IEC 60862-3, IEC 61019-3, ANSI/IEEE Std 176-1987, EN ISO 4287:1998, EN 61019-2, IEC 60862-1, IEC 61019-2, ISO 4287:1997
ReplacesBS EN 62276:2013
International RelationshipsEN 60335-2-3:2002/A11:2010,EN 62276:2016,IEC 62276:2016
Draft Superseded By09/30207007 DC15/30318551 DC
DescriptorsElectromechanical filters, Substrates (insulating), Acoustic waves, Electrical wave measurement, Acoustic measurement, Dielectric devices, Acoustoelectric devices, Acoustic filters, Quartz, Crystals (electronic), Crystal resonators, Piezoelectric devices
ICS31.140
Title in FrenchTranches monocristallines pour applications utilisant des dispositifs à ondes acoustiques de surface (OAS). Spécifications et méthodes de mesure
Title in GermanEinkristall-Wafer für Oberflächenwellen-(OFW-)Bauelemente. Festlegungen und Messverfahren
CommitteeEPL/49
ISBN978 0 580 89222 6
PublisherBSI
FormatA4
DeliveryYes
Pages46
File Size2.381 MB
Price£240.00


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