BS ISO 16700:2016 - Microbeam analysis. Scanning electron microscopy. Guidelines for calibrating image magnification

BS ISO 16700:2016

Microbeam analysis. Scanning electron microscopy. Guidelines for calibrating image magnification

Status : Current   Published : July 2016

Format
PDF

Format
HARDCOPY



This International Standard specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. This International Standard does not apply to the dedicated critical dimension measurement SEM.




Standard NumberBS ISO 16700:2016
TitleMicrobeam analysis. Scanning electron microscopy. Guidelines for calibrating image magnification
StatusCurrent
Publication Date31 July 2016
Normative References(Required to achieve compliance to this standard)ISO/IEC 17025:2005, ISO Guide 30, ISO Guide 34, ISO Guide 35
Informative References(Provided for Information)ISO 5725-1, ISO/IEC Guide 98-3, GUM:1995
ReplacesBS ISO 16700:2004
International RelationshipsISO 16700:2016
Draft Superseded By15/30317578 DC
DescriptorsScanning electron microscopes, Electron microscopes, Microscopes, Optical instruments, Electron optics, Electron beams, Magnification, Optical phenomena, Calibration, Control samples, Accuracy
ICS37.020
Title in FrenchAnalyse par microfaisceaux. Microscopie électronique à balayage. Lignes directrices pour l’étalonnage du grandissement d’image
CommitteeCII/9
ISBN978 0 580 89052 9
PublisherBSI
FormatA4
DeliveryYes
Pages30
File Size4.027 MB
Price£182.00


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