BS ISO 11952:2019 - Surface chemical analysis. Scanning-probe microscopy. Determination of geometric quantities using SPM: Calibration of measuring systems

BS ISO 11952:2019

Surface chemical analysis. Scanning-probe microscopy. Determination of geometric quantities using SPM: Calibration of measuring systems

Status : Current   Published : May 2019

Format
PDF

Format
HARDCOPY



This document specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes (SPMs) for measuring geometric quantities at the highest level. It is applicable to those providing further calibrations and is not intended for general industry use, where a lower level of calibration might be required.

This document has the following objectives:

  • to increase the comparability of measurements of geometrical quantities made using SPMs by traceability to the unit of length;

  • to define the minimum requirements for the calibration process and the conditions of acceptance;

  • to ascertain the instrument's ability to be calibrated (assignment of a “calibrate-ability” category to the instrument);

  • to define the scope of the calibration (conditions of measurement and environments, ranges of measurement, temporal stability, transferability);

  • to provide a model, in accordance with ISO/IEC Guide 98-3, to calculate the uncertainty for simple geometrical quantities in measurements using an SPM;

  • to define the requirements for reporting results.




Standard NumberBS ISO 11952:2019
TitleSurface chemical analysis. Scanning-probe microscopy. Determination of geometric quantities using SPM: Calibration of measuring systems
StatusCurrent
Publication Date31 May 2019
Normative References(Required to achieve compliance to this standard)ISO/IEC Guide 98-3, ISO 11039, IEC/TS 62622, ISO 18115-2
Informative References(Provided for Information)ISO 5436-1, ISO 12179, ISO 4288, ISO Guide 34, ISO Guide 30, ISO 12853, ISO 4287, ISO 3274
International RelationshipsISO 11952:2019
DescriptorsMeasurement, Surfaces, Calibration, Quantity, Chemical analysis and testing
ICS71.040.40
Title in FrenchAnalyse chimique des surfaces. Microscopie à sonde à balayage. Détermination des quantités géométriques en utilisant des microscopes à sonde à balayage: Étalonnage des systèmes de mesure
CommitteeCII/60
ISBN978 0 580 88296 8
PublisherBSI
FormatA4
DeliveryYes
Pages72
File Size8.532 MB
Price£274.00


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