BS EN ISO 14644-15:2017 - Cleanrooms and associated controlled environments. Assessment of suitability for use of equipment and materials by airborne chemical concentration

BS EN ISO 14644-15:2017

Cleanrooms and associated controlled environments. Assessment of suitability for use of equipment and materials by airborne chemical concentration

Status : Current   Published : January 2018

Format
PDF

Format
HARDCOPY






Standard NumberBS EN ISO 14644-15:2017
TitleCleanrooms and associated controlled environments. Assessment of suitability for use of equipment and materials by airborne chemical concentration
StatusCurrent
Publication Date11 January 2018
Normative References(Required to achieve compliance to this standard)ISO 14644-8:2013
Informative References(Provided for Information)ISO 16000-6, ISO 14644-10, AIR1167, IEST-RP-CC013, SEMI F70-0611, ISO 14644-1, JIS B 9926, ISO 8573-8, ISO 16000-9, ISO 2889, SEMI E137-0705, IEST-RP-CC028, IEST-RP-CC002, VDI 2083-9.1, SEMI G67-0996, ISO 14644-14, IEST-RP-CC026.2, SEMI E49-1104, SEMI F28-1103
International RelationshipsEN ISO 14644-15:2017,ISO 14644-15:2017
Draft Superseded By16/30295652 DC
DescriptorsMathematical calculations, Sampling methods, Sequential sampling, Designations, Test equipment, Sample location, Particulate air pollutants, Environmental cleanliness, Clean rooms, Algorithms, Particle size distribution, Samples, Concentration, Outliers, Conformity, Statistical methods of analysis, Classification systems
ICS13.040.35
Title in FrenchSalles propres et environnements maîtrisés apparentés Évaluation de l'aptitude à l'emploi des équipements et des matériaux par la détermination de la concentration chimique aéroportée
Title in GermanReinräume und zugehörige Reinraumbereiche Bewertung der Reinraumtauglichkeit von Geräten und Materialien anhand der chemischen Luft- und Oberflächenkonzentration
CommitteeLBI/30
ISBN978 0 580 85502 3
PublisherBSI
FormatA4
DeliveryYes
Pages30
File Size1.061 MB
Price£182.00


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