ISO 18516:2019 - Surface chemical analysis. Determination of lateral resolution and sharpness in beam based methods with a range from nanometres to micrometres

ISO 18516:2019

Surface chemical analysis. Determination of lateral resolution and sharpness in beam based methods with a range from nanometres to micrometres

Status : Current   Published : January 2019

Format
PDF

Format
HARDCOPY






Standard NumberISO 18516:2019
TitleSurface chemical analysis. Determination of lateral resolution and sharpness in beam based methods with a range from nanometres to micrometres
StatusCurrent
Publication Date15 January 2019
Normative References(Required to achieve compliance to this standard)ISO 16243:2011, ISO 16242:2011
Informative References(Provided for Information)ISO 6196-5:1987, ISO 22493:2008, ISO/IEC Guide 98-3:2008, ISO/TR 19319:2013
Draft Superseded ByISO/DIS 18516
ICS71.040.40
Title in FrenchAnalyse chimique des surfaces — Détermination de la résolution latérale et de la netteté par des méthodes à base de faisceau utilisant une gamme allant des nanomètres aux micromètres
CommitteeCII/60
PublisherISO
FormatA4
DeliveryYes
Pages60
File Size5.221 MB
Price£143.00


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