15/30291643 DC - BS ISO 18516. Surface chemical analysis. Determination of lateral resolution and sharpness in beam based methods

15/30291643 DC

BS ISO 18516. Surface chemical analysis. Determination of lateral resolution and sharpness in beam based methods

Status : Current, Draft for public comment   Published : March 2015

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Standard Number15/30291643 DC
TitleBS ISO 18516. Surface chemical analysis. Determination of lateral resolution and sharpness in beam based methods
StatusCurrent, Draft for public comment
Publication Date03 March 2015
Normative References(Required to achieve compliance to this standard)ISO 16242:2011, ISO 16243:2011, ISO/TR 19319:2013
Informative References(Provided for Information)ISO 6196-5:1987, GUM:1995, ISO/TR 19319:2013, ISO/IEC Guide 98-3:2008, ISO 22493:2008
International RelationshipsISO/DIS 18516
Draft Expiry Date02 May 2015
DescriptorsX-ray photoelectron spectroscopy, Electron physics, Side, Chemical analysis and testing, Dimensional measurement, Surfaces, Spectroscopy, Resolution, Electron emission, Photoelectron spectroscopy, Surface chemistry, Auger electron spectroscopy, Straight
ICS71.040.40
CommitteeCII/60
PublisherBSI
FormatA4
DeliveryYes
Pages58
File Size4.295 MB
NotesWarning: this draft is not current beyond its expiry date for comments.
Price£20.00


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