BS EN ISO 14644-14:2016 - Cleanrooms and associated controlled environments. Assessment of suitability for use of equipment by airborne particle concentration

BS EN ISO 14644-14:2016

Cleanrooms and associated controlled environments. Assessment of suitability for use of equipment by airborne particle concentration

Status : Current   Published : October 2016

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PDF

Format
HARDCOPY






Standard NumberBS EN ISO 14644-14:2016
TitleCleanrooms and associated controlled environments. Assessment of suitability for use of equipment by airborne particle concentration
StatusCurrent
Publication Date31 October 2016
Normative References(Required to achieve compliance to this standard)ISO 14644-1:2015
Informative References(Provided for Information)SEMI E137-0705, ISO 14644-7:2004, SEMI G67-0996, ISO 14644-9, SEMI F28-1103, JIS B 9926, AIR 1167, SEMI F70-0611, IEST-RP-CC002.3, IEST-RP-CC028.1, SEMI E49-1104, IEST-RP-CC013.3, ISO 8573-8:2004, VDI 2083-9.1, IEST RP-CC026.2, ISO 14644-3:2019, BS EN ISO 14644-3:2019
International RelationshipsISO 14644-14:2016,EN ISO 14644-14:2016,EN ISO 14644-14
Draft Superseded By14/30280736 DC
DescriptorsPerformance testing, Environmental cleanliness, Clean rooms, Communicable disease control, Waste handling, Instructions for use, Environment (working), Rooms, Air-distribution systems, Cleaning, Classification systems, Maintenance, Contamination, Air treatment devices, Design, Qualification approval, Access, Installation, Leak tests, Air cleaning equipment
ICS13.040.35
Title in FrenchSalles propres et environnements maîtrisés apparentés. Évaluation de l'aptitude à l'emploi des équipements par la détermination de la concentration de particules en suspension dans l'air
Title in GermanReinräume und zugehörige Reinraumbereiche. Bewertung der Reinraumtauglichkeit von Geräten durch Partikelkonzentration in der Luft
CommitteeLBI/30
ISBN978 0 580 82493 7
PublisherBSI
FormatA4
DeliveryYes
Pages32
File Size2.084 MB
Price£182.00


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