PD IEC/TS 62622:2012 - Nanotechnologies. Description, measurement and dimensional quality parameters of artificial gratings

PD IEC/TS 62622:2012

Nanotechnologies. Description, measurement and dimensional quality parameters of artificial gratings

Status : Current   Published : February 2013

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IEC/TS 62622:2012(E), which is a technical specification, specifies the generic terminology for the global and local quality parameters of artificial gratings, interpreted in terms of deviations from nominal positions of grating features, and provides guidance on the categorization of measurement and evaluation methods for their determination. This specification is intended to facilitate communication among manufacturers, users and calibration laboratories dealing with the characterization of the dimensional quality parameters of artificial gratings used in nanotechnology. This specification supports quality assurance in the production and use of artificial gratings in different areas of application in nanotechnology. Whilst the definitions and described methods are universal to a large variety of different gratings, the focus is on one-dimensional (1D) and two-dimensional (2D) gratings.




Standard NumberPD IEC/TS 62622:2012
TitleNanotechnologies. Description, measurement and dimensional quality parameters of artificial gratings
StatusCurrent
Publication Date28 February 2013
Normative References(Required to achieve compliance to this standard)ISO/TS 80004-1:2010, ISO/IEC 17025
Informative References(Provided for Information)SEMI P35, GOST R 8.630-2007, GOST R 8.635-2007, ISO/CD 25178-70, GOST R 8.631-2007, GOST R 8.636-2007, DIN 2268:1975, ISO 15902:2004, GOST R 8.629-2007, ISO 16700:2004, OIML R 98, GOST R 8.644-2008, ISO 29301:2010, ISO/CD 11952, GOST R 8.628-2007, ISO/TS 16610-1:2006, ISO 14660-1:1999
International RelationshipsIEC TS 62622:2012
DescriptorsTerminology, Vocabulary, Nanotechnology, Nanomaterials
ICS07.030
07.120
CommitteeNTI/1
ISBN978 0 580 80384 0
PublisherBSI
FormatA4
DeliveryYes
Pages44
File Size1.727 MB
Price£214.00


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