BS EN 62047-21:2014 - Semiconductor devices. Micro-electromechanical devices. Test method for Poisson's ratio of thin film MEMS materials

BS EN 62047-21:2014

Semiconductor devices. Micro-electromechanical devices. Test method for Poisson's ratio of thin film MEMS materials

Status : Current   Published : October 2014

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IEC 62047-21:2014 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 µm.




Standard NumberBS EN 62047-21:2014
TitleSemiconductor devices. Micro-electromechanical devices. Test method for Poisson's ratio of thin film MEMS materials
StatusCurrent
Publication Date31 October 2014
Normative References(Required to achieve compliance to this standard)IEC 62047-8:2011, ASTM E 132-04:2010, EN 62047-8:2011
Informative References(Provided for Information)No other standards are informatively referenced
International RelationshipsEN 62047-21:2014,IEC 62047-21:2014
DescriptorsVibration, Semiconductor technology, Fatigue testing, Test specimens, Semiconductor devices, Resonance, Electronic equipment and components, Test equipment, Thin-film devices, Bend testing, Electromechanical devices, Integrated circuits
ICS31.080.99
Title in FrenchDispositifs à semiconducteurs. Dispositifs microélectromécaniques. Méthode d'essai relative au coefficient de Poisson des matériaux MEMS en couche mince
Title in GermanHalbleiterbauelemente. Bauelemente der Mikrosystemtechnik. Prüfverfahren zur Querkontraktionszahl von Dünnschichtwerkstoffen der Mikrosystemtechnik
CommitteeEPL/47
ISBN978 0 580 77554 3
PublisherBSI
FormatA4
DeliveryYes
Pages18
File Size1.488 MB
Price£134.00


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