BS EN ISO 14644-8:2013 - Cleanrooms and associated controlled environments. Classification of air cleanliness by chemical concentration (ACC)

BS EN ISO 14644-8:2013

Cleanrooms and associated controlled environments. Classification of air cleanliness by chemical concentration (ACC)

Status : Under review, Current   Published : February 2013

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PDF

Format
HARDCOPY






Standard NumberBS EN ISO 14644-8:2013
TitleCleanrooms and associated controlled environments. Classification of air cleanliness by chemical concentration (ACC)
StatusUnder review, Current
Publication Date28 February 2013
Normative References(Required to achieve compliance to this standard)ISO 14644-6
Informative References(Provided for Information)SEMI E460307, ISO 14644-5:2004, JIS B9917-8:2010, SEMI E108-0307, ISO 14698, ASTM D5127-99, JACA No. 34-:2000, JACA No. 35A-2003, ISO 14644-4:2001, IEST-RP-CC031.2, ISO 14644-7:2004, SEMI F21-1102, JACA No. 43-2006, IEST-G-CC035.1, SEMI E45-1101, IDEMA Standard M11-99
ReplacesBS EN ISO 14644-8:2006
International RelationshipsEN ISO 14644-8:2013,ISO 14644-8:2013
Draft Superseded By11/30248115 DC
DescriptorsEnvironmental cleanliness, Classification systems, Environment (working), Sampling methods, Verification, Concentration, Designations, Chemical analysis and testing, Air pollution, Contamination, Clean rooms, Air, Molecules, Test equipment
ICS13.040.35
Title in FrenchSalles propres et environnements maîtrisés apparentés. Classification de la propreté chimique de l'air
Title in GermanReinräume und zugehörige Reinraumbereiche. Klassifizierung der Luftreinheit anhand der Chemikalienkonzentration (ACC)
CommitteeLBI/30
ISBN978 0 580 75693 1
PublisherBSI
FormatA4
DeliveryYes
Pages34
File Size1.423 MB
Price£218.00


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