BS ISO 16413:2013 - Evaluation of thickness, density and interface width of thin films by X-ray reflectometry. Instrumental requirements, alignment and positioning, data collection, data analysis and reporting

BS ISO 16413:2013

Evaluation of thickness, density and interface width of thin films by X-ray reflectometry. Instrumental requirements, alignment and positioning, data collection, data analysis and reporting

Status : Superseded, Withdrawn   Published : March 2013 Replaced By : BS ISO 16413:2020

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Standard NumberBS ISO 16413:2013
TitleEvaluation of thickness, density and interface width of thin films by X-ray reflectometry. Instrumental requirements, alignment and positioning, data collection, data analysis and reporting
StatusSuperseded, Withdrawn
Publication Date31 March 2013
Withdrawn Date18 August 2020
Normative References(Required to achieve compliance to this standard)No other standards are normatively referenced
Informative References(Provided for Information)ISO/IEC Guide 98-3:2008, GUM:1995, ISO 25178-2
Replaced ByBS ISO 16413:2020
International RelationshipsISO 16413:2013
Draft Superseded By12/30235353 DC
DescriptorsX-ray apparatus, X-ray analysis, Instruments, Density measurement, X-rays, Thickness measurement
ICS35.240.70
71.040.40
Title in FrenchÉvaluation de l’épaisseur, de la densité et de la largeur de l’interface des films fins par réflectrométrie de rayons X. Exigences instrumentales, alignement et positionnement, rassemblement des données, analyse des données et rapport
CommitteeCII/60
ISBN978 0 580 73016 0
PublisherBSI
FormatA4
DeliveryYes
Pages42
File Size2.049 MB
Price£218.00


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