PD ISO/TR 19319:2013 - Surface chemical analysis. Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods

PD ISO/TR 19319:2013

Surface chemical analysis. Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods

Status : Current   Published : March 2013

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Standard NumberPD ISO/TR 19319:2013
TitleSurface chemical analysis. Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods
StatusCurrent
Publication Date31 March 2013
Normative References(Required to achieve compliance to this standard)No other standards are normatively referenced
Informative References(Provided for Information)ISO 9335:1995, ISO/IEC Guide 98-3:2008, ISO 9334:2007, ISO 18516:2006, ASTM E 1217-00, ISO 22493:2008
ReplacesPD ISO/TR 19319:2003
International RelationshipsISO/TR 19319:2013
DescriptorsAuger electron spectroscopy, Surface chemistry, Electron emission, Photoelectron spectroscopy, Chemical analysis and testing, Spectroscopy, Resolution, Area, Surfaces, Chemical composition, X-ray photoelectron spectroscopy
ICS71.040.40
Title in FrenchAnalyse chimique des surfaces. Approche fondamentale pour la détermination de la résolution latérale et de la netteté par des méthodes à base de faisceau
CommitteeCII/60
ISBN978 0 580 71186 2
PublisherBSI
FormatA4
DeliveryYes
Pages126
File Size7.796 MB
Price£314.00


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