BS EN 62047-11:2013 - Semiconductor devices. Micro-electromechanical devices. Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems

BS EN 62047-11:2013

Semiconductor devices. Micro-electromechanical devices. Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems

Status : Current   Published : October 2013

Format
PDF

Format
HARDCOPY



IEC 62047-11:2013 specifies the test method to measure the linear thermal expansion coefficients (CLTE) of thin free-standing solid (metallic, ceramic, polymeric, etc.) micro-electro-mechanical system (MEMS) materials with length between 0,1 mm and 1 mm and width between 10 micrometre and 1 mm and thickness between 0,1 micrometre and 1 mm, which are main structural materials used for MEMS, micromachines and others. This test method is applicable for the CLTE measurement in the temperature range from room temperature to 30 % of a material's melting temperature.




Standard NumberBS EN 62047-11:2013
TitleSemiconductor devices. Micro-electromechanical devices. Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems
StatusCurrent
Publication Date31 October 2013
Normative References(Required to achieve compliance to this standard)EN 62047-3, IEC 62047-3
Informative References(Provided for Information)ASTM E831 – 06, ASTM E228 – 11, ASTM E289 – 04(2010)
International RelationshipsEN 62047-11:2013,IEC 62047-11:2013
Draft Superseded By10/30211446 DC
DescriptorsElectromechanical devices, Semiconductor technology, Terminology, Integrated circuits, Vocabulary, Semiconductor devices, Electronic equipment and components
ICS31.080.99
Title in FrenchDispositifs à semiconducteurs. Dispositifs microélectromécaniques. Méthode d'essai pour les coefficients de dilatation thermique linéaire des matériaux autonomes pour systèmes microélectromécaniques
Title in GermanHalbleiterbauelemente. Bauelemente der Mikrosystemtechnik. Prüfverfahren für lineare thermische Ausdehnungskoeffizienten für freistehende Werkstoffe der Mikrosystemtechnik
CommitteeEPL/47
ISBN978 0 580 69448 6
PublisherBSI
FormatA4
DeliveryYes
Pages24
File Size1.034 MB
Price£182.00


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