BS ISO 13083:2015 - Surface chemical analysis. Scanning probe microscopy. Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes

BS ISO 13083:2015

Surface chemical analysis. Scanning probe microscopy. Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes

Status : Current   Published : August 2015

Format
PDF

Format
HARDCOPY






Standard NumberBS ISO 13083:2015
TitleSurface chemical analysis. Scanning probe microscopy. Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes
StatusCurrent
Publication Date31 August 2015
Normative References(Required to achieve compliance to this standard)ISO 18115-2
Informative References(Provided for Information)ISO 18516
International RelationshipsISO 13083:2015
Draft Superseded By13/30203227 DC
DescriptorsSurface chemistry, Surface properties, Surfaces, Chemical analysis and testing, Calibration, Sampling methods, Data representation, Microscopes
ICS71.040.40
Title in FrenchAnalyse chimique des surfaces. Microscopie à sonde à balayage. Normes sur la définition et l’étalonnage de la résolution spatiale des microscopes électriques à sonde à balayage (ESPMs) comme SSRM et SCM pour l’imagerie 2D-dopant et d’autres fins
CommitteeCII/60
ISBN978 0 580 67751 9
PublisherBSI
FormatA4
DeliveryYes
Pages26
File Size2.27 MB
Price£182.00


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