BS ISO 12406:2010 - Surface chemical analysis. Secondary-ion mass spectrometry. Method for depth profiling of arsenic in silicon

BS ISO 12406:2010

Surface chemical analysis. Secondary-ion mass spectrometry. Method for depth profiling of arsenic in silicon

Status : Confirmed, Current   Published : November 2010

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Standard NumberBS ISO 12406:2010
TitleSurface chemical analysis. Secondary-ion mass spectrometry. Method for depth profiling of arsenic in silicon
StatusConfirmed, Current
Publication Date30 November 2010
Confirm Date17 June 2016
Normative References(Required to achieve compliance to this standard)ISO 18115-1, ISO 18114:2003, ISO 14237:2010
Informative References(Provided for Information)ISO 5725-2, ISO 17560
International RelationshipsISO 12406:2010
Draft Superseded By10/30199169 DC
DescriptorsSurface chemistry, Arsenic, Interferometry, Depth, Determination of content, Chemical analysis and testing, Silicon, Surfaces, Ions, Profile measurement, Mass spectrometry, Secondary
ICS71.040.40
Title in FrenchAnalyse chimique des surfaces. Spectrométrie de masse des ions secondaires. Dosage de l'arsenic dans le silicium par profilage d'épaisseur
Title in GermanChemische Oberflächenanalyse. Sekundärionenmassenspektroskopie. Verfahren zur Tiefenprofilanalyse von Arsen in Silicium
CommitteeCII/60
ISBN978 0 580 66874 6
PublisherBSI
FormatA4
DeliveryYes
Pages24
File Size1.161 MB
Price£182.00


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