BS EN ISO 14644-10:2013 - Cleanrooms and associated controlled environments. Classification of surface cleanliness by chemical concentration

BS EN ISO 14644-10:2013

Cleanrooms and associated controlled environments. Classification of surface cleanliness by chemical concentration

Status : Current, Under review   Published : April 2013

Format
PDF

Format
HARDCOPY






Standard NumberBS EN ISO 14644-10:2013
TitleCleanrooms and associated controlled environments. Classification of surface cleanliness by chemical concentration
StatusCurrent, Under review
Publication Date30 April 2013
Normative References(Required to achieve compliance to this standard)ISO 14644-1, ISO 14644-6
Informative References(Provided for Information)ISO 18115-1, JIS K 0311:2005, ISO 10312, ISO 17052, ISO 14644-8, ISO 18116, ISO 14644-9, SEMI E46-0307
International RelationshipsEN ISO 14644-10:2013,ISO 14644-10:2013
Draft Superseded By11/30196563 DC
DescriptorsConcentration (chemical), Chemical cleaning, Classification systems, Surfaces, Controlled-atmosphere rooms, Environmental cleanliness
ICS13.040.35
Title in FrenchSalles propres et environnements maîtrisés apparentés. Classification de la propreté chimique des surfaces
Title in GermanReinräume und zugehörige Reinraumbereiche. Klassifizierung der chemischen Oberflächenreinheit
CommitteeLBI/30
ISBN978 0 580 66236 2
PublisherBSI
FormatA4
DeliveryYes
Pages40
File Size2.204 MB
Price£218.00


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