| Standard Number | BS EN ISO 14644-10:2013 |
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| Title | Cleanrooms and associated controlled environments. Classification of surface cleanliness by chemical concentration |
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| Status | Under review, Current |
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| Publication Date | 30 April 2013 |
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| Normative References(Required to achieve compliance to this standard) | ISO 14644-1, ISO 14644-6 |
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| Informative References(Provided for Information) | ISO 18115-1, JIS K 0311:2005, ISO 10312, ISO 17052, ISO 14644-8, ISO 18116, ISO 14644-9, SEMI E46-0307 |
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| International Relationships | EN ISO 14644-10:2013,ISO 14644-10:2013 |
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| Draft Superseded By | 11/30196563 DC |
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| Descriptors | Concentration (chemical), Chemical cleaning, Classification systems, Surfaces, Controlled-atmosphere rooms, Environmental cleanliness |
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| ICS | 13.040.35
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| Title in French | Salles propres et environnements maîtrisés apparentés. Classification de la propreté chimique des surfaces |
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| Title in German | Reinräume und zugehörige Reinraumbereiche. Klassifizierung der chemischen Oberflächenreinheit |
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| Committee | LBI/30 |
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| ISBN | 978 0 580 66236 2 |
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| Publisher | BSI |
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| Format | A4 |
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| Delivery | Yes |
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| Pages | 40 |
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| File Size | 2.204 MB |
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| Price | £214.00 |
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