Standard Number | BS EN ISO 14644-10:2013 |
Title | Cleanrooms and associated controlled environments. Classification of surface cleanliness by chemical concentration |
Status | Current, Under review |
Publication Date | 30 April 2013 |
Normative References(Required to achieve compliance to this standard) | ISO 14644-1, ISO 14644-6 |
Informative References(Provided for Information) | ISO 18115-1, JIS K 0311:2005, ISO 10312, ISO 17052, ISO 14644-8, ISO 18116, ISO 14644-9, SEMI E46-0307 |
International Relationships | EN ISO 14644-10:2013,ISO 14644-10:2013 |
Draft Superseded By | 11/30196563 DC |
Descriptors | Concentration (chemical), Chemical cleaning, Classification systems, Surfaces, Controlled-atmosphere rooms, Environmental cleanliness |
ICS | 13.040.35
|
Title in French | Salles propres et environnements maîtrisés apparentés. Classification de la propreté chimique des surfaces |
Title in German | Reinräume und zugehörige Reinraumbereiche. Klassifizierung der chemischen Oberflächenreinheit |
Committee | LBI/30 |
ISBN | 978 0 580 66236 2 |
Publisher | BSI |
Format | A4 |
Delivery | Yes |
Pages | 40 |
File Size | 2.204 MB |
Price | £218.00 |