BS EN ISO 14644-9:2012 - Cleanrooms and associated controlled environments. Classification of surface cleanliness by particle concentration

BS EN ISO 14644-9:2012

Cleanrooms and associated controlled environments. Classification of surface cleanliness by particle concentration

Status : Under review, Current   Published : August 2012

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Standard NumberBS EN ISO 14644-9:2012
TitleCleanrooms and associated controlled environments. Classification of surface cleanliness by particle concentration
StatusUnder review, Current
Publication Date31 August 2012
Normative References(Required to achieve compliance to this standard)ISO 14644-6:2007
Informative References(Provided for Information)ISO/TS 21748:2004, ISO 5725-2:1994, IEST-RP-CC022.2-2004, CLC/TR 61340-5-2:2008, ISO 10576-1:2003, IEC 61340-5-1:2007, ASTM F24-09, SEMI E78-0706, IEST-STD-CC1246D, ASTM F312-08, SEMI E43-0301, ISO 16232-2:2007, ASTM F303-08, ISO 16232-5:2007, ISO 16232-4:2007, ASTM E1216-06, ISO 16232-3:2007, ASTM E18-07, ISO 4287:1997, ISO 10015:1999, ISO 4288:1996
International RelationshipsEN ISO 14644-9:2012,ISO 14644-9:2012
Draft Superseded By08/30190157 DC
DescriptorsEnvironmental cleanliness, Contamination, Molecules, Clean rooms, Surfaces, Environment (working), Chemical analysis and testing, Cleaning equipment
ICS13.040.35
Title in FrenchSalles propres et environnements maîtrisés apparentés. Classification de la propreté des surfaces par la concentration de particules
Title in GermanReinräume und zugehörige Reinraumbereiche. Klassifzierung der partikulären Oberflächenreinheit
CommitteeLBI/30
ISBN978 0 580 64583 9
PublisherBSI
FormatA4
DeliveryYes
Pages36
File Size1.265 MB
Price£214.00


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