BS ISO 17331:2004+A1:2010 - Surface chemical analysis. Chemical methods for the collection of elements from the surface of silicon-wafer working reference materials and their determination by total-reflection X-ray fluorescence (TXRF) spectroscopy

BS ISO 17331:2004+A1:2010

Surface chemical analysis. Chemical methods for the collection of elements from the surface of silicon-wafer working reference materials and their determination by total-reflection X-ray fluorescence (TXRF) spectroscopy

Status : Current   Published : March 2005

Format
PDF

Format
HARDCOPY






Standard NumberBS ISO 17331:2004+A1:2010
TitleSurface chemical analysis. Chemical methods for the collection of elements from the surface of silicon-wafer working reference materials and their determination by total-reflection X-ray fluorescence (TXRF) spectroscopy
StatusCurrent
Publication Date31 March 2005
Normative References(Required to achieve compliance to this standard)ISO 5725-2:1994, ISO 14644-1:1999, ISO 14706:2000
Informative References(Provided for Information)No other standards are informatively referenced
International RelationshipsISO 17331:2004
Amended ByAmendment, September 2010. Amends and replaces BS ISO 17331:2004.
Draft Superseded By02/122627 DC09/30189522 DC
DescriptorsSurface chemistry, Chemical analysis and testing, Silicon, Substrates (insulating), Control samples, X-ray fluorescence spectrometry, Spectrophotometry, Spectroscopy, Fluorimetry, Iron, Nickel, Decomposition reactions
ICS71.040.40
Title in FrenchAnalyse chimique des surfaces. Méthodes chimiques pour collecter les éléments analysés de tranches de silicium comme matériaux de référence pour l'analyse par spectroscopie de fluorescence X en réflexion totale (TXRF)
Title in GermanChemische Analytik an Oberflächen. Chemische Methoden für die Sammlung von Elementen von der Oberfläche von Siliziumscheiben-Arbeits-Referenzmaterialien und deren Bestimmung mit Totalreflexions-Röntgenfluoreszenzanalyse (TXRF)
CommitteeCII/60
ISBN978 0 580 64479 5
PublisherBSI
FormatA4
DeliveryYes
Pages28
File Size839.4 KB
Price£182.00


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