PAS 135:2007 - Terminology for nanofabrication

PAS 135:2007

Terminology for nanofabrication

Status : Withdrawn   Published : December 2007

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Standard NumberPAS 135:2007
TitleTerminology for nanofabrication
StatusWithdrawn
Publication Date31 December 2007
Normative References(Required to achieve compliance to this standard)No other standards are normatively referenced
Informative References(Provided for Information)No other standards are informatively referenced
DescriptorsNanotechnology, Nanomaterials, Vocabulary, Terminology, Production, Chemical technology processes, Etching, Photolithography, Coating processes
ICS01.040.71
71.100.99
CommitteeZZ/1
ISBN978 0 580 61320 3
PublisherBSI
FormatA4
DeliveryNo
Pages24
File Size244.2 KB
NotesWithdrawn as used as basis for ISO/TR 12802:2010 and ISO/TS 8004 parts 1 to 8
Price£170.00


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