BS ISO 14237:2010 - Surface chemical analysis. Secondary-ion mass spectrometry. Determination of boron atomic concentration in silicon using uniformly doped materials

BS ISO 14237:2010

Surface chemical analysis. Secondary-ion mass spectrometry. Determination of boron atomic concentration in silicon using uniformly doped materials

Status : Confirmed, Current   Published : August 2010

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Standard NumberBS ISO 14237:2010
TitleSurface chemical analysis. Secondary-ion mass spectrometry. Determination of boron atomic concentration in silicon using uniformly doped materials
StatusConfirmed, Current
Publication Date31 August 2010
Confirm Date17 February 2016
Normative References(Required to achieve compliance to this standard)ISO 18114, ISO 17560
Informative References(Provided for Information)SEMI MF110-1107, SEMI MF95-1107, SEMI MF84-0307, SEMI MF43-0705, SEMI MF723-0307, SEMI MF672-0307, SEMI MF374-0307, SEMI MF1392-0307, SEMI MF674-0705, ISO 5725-2
ReplacesBS ISO 14237:2000
International RelationshipsISO 14237:2010
Draft Superseded By09/30153670 DC
DescriptorsSpectroscopy, Crystals, Precision, Test equipment, Mass spectrometry, Statistical methods of analysis, Chemical analysis and testing, Semiconductor technology, Performance testing, Mathematical calculations, Surface chemistry, Homogeneity, Isotopes, Silicon, Boron, Determination of content, Secondary, Doping agents, Calibration, Control samples, Single, Concentration (chemical), Specimen preparation, Ions, Surface properties
ICS71.040.40
Title in FrenchAnalyse chimique des surfaces. Spectrométrie de masse des ions secondaires. Dosage des atomes de bore dans le silicium à l'aide de matériaux dopés uniformément
Title in GermanChemische Oberflächenanalyse. Sekundärionenmassenspektrometrie. Bestimmung des Elementgehalts von Bor in Silizium unter Verwendung gleichförmig dotierter Materialien
CommitteeCII/60
ISBN978 0 580 57402 3
PublisherBSI
FormatA4
DeliveryYes
Pages30
File Size451 KB
Price£182.00


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