BS EN 62047-4:2010 - Semiconductor devices. Micro-electromechanical devices. Generic specification for MEMS

BS EN 62047-4:2010

Semiconductor devices. Micro-electromechanical devices. Generic specification for MEMS

Status : Current   Published : November 2010



IEC 62047-4:2008 describes the generic specifications for micro-electromechanical systems (MEMS) made by semiconductors, which are the basis for specifications given in other parts of this series for various types of MEMS applications such as sensors, RF MEMS, excluding optical MEMS, bio MEMS, micro TAS, and power MEMS. This standard specifies general procedures for quality assessment to be used in IECQ-CECC systems and establishes general principles for describing and testing of electrical, optical, mechanical and environmental characteristics. IEC 62047-4:2008 aids in the preparation of standards that define devices and systems made by micromachining technology, including but not limited to, material characterization and handling, assembly and testing, process control and measuring methods. MEMS described in this standard are basically made of semiconductor material. However, the statements made in this standard are also applicable to MEMS using materials other than semiconductor, for example, polymers, glass, metals and ceramic materials.

Standard NumberBS EN 62047-4:2010
TitleSemiconductor devices. Micro-electromechanical devices. Generic specification for MEMS
Publication Date30 November 2010
Normative References(Required to achieve compliance to this standard)IEC 61193-2, EN 60749, IEC 62047-1, IEC QC 001002-3:2005, ISO 2859-1, IEC 60068-2, IEC 60749, IEC 60027, EN 60068-2, IEC 60617, EN 61193-2, EN 62047-1, EN 60027, IEC 60747-1:2006, ISO 1000
Informative References(Provided for Information)IEC 60721-3-1, EN 60721-3-0, IEC 60721-2-1, IEC 60410, IEC 60721-3-0:1984, IEC 60721-3-0:1984/AMD 1:1987, EN 60721-3-1
International RelationshipsEN 62047-4:2010,IEC 62047-4:2008
Draft Superseded By07/30148822 DC
DescriptorsElectronic equipment and components, Specification (approval), Semiconductors, Assessed quality, Semiconductor technology, Integrated circuits, Acceptance (approval), Semiconductor devices, Electromechanical devices, Inspection, Qualification approval, Testing conditions
Title in FrenchDispositifs à semiconducteurs. Dispositifs microélectromécaniques. Spécification générique pour les MEMS
Title in GermanHalbleiterbauelemente. Bauteile der Mikrosystemtechnik. Fachgrundspezifikation für Mikrosystemtechnik
ISBN978 0 580 56857 2
File Size1.051 MB

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