PD ISO/TR 16268:2009 - Surface chemical analysis. Proposed procedure for certifying the retained areic dose in a working reference material produced by ion implantation

PD ISO/TR 16268:2009

Surface chemical analysis. Proposed procedure for certifying the retained areic dose in a working reference material produced by ion implantation

Status : Current   Published : November 2009

Format
PDF

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Standard NumberPD ISO/TR 16268:2009
TitleSurface chemical analysis. Proposed procedure for certifying the retained areic dose in a working reference material produced by ion implantation
StatusCurrent
Publication Date30 November 2009
Normative References(Required to achieve compliance to this standard)ISO 18115
Informative References(Provided for Information)ISO/IEC Guide 98-3:2008, ISO Guide 30:1992, GUM:1995
International RelationshipsISO/TR 16268:2009
DescriptorsControl samples, Substrates (insulating), Chemical analysis and testing, Surface chemistry, Surfaces, Ions, Measurement, Silicon, Certification (approval)
ICS71.040.30
71.040.40
Title in FrenchAnalyse chimique des surfaces. Mode opératoire proposé pour certifier la dose aréique retenue dans un matériau de référence de travail produit par implantation d'ions
Title in GermanChemische Oberflächenanalyse. Vorschlag für ein Verfahren für die Zertifizierung der zurückbehaltenen Partikel-Fluenz eines durch Ionenimplantation hergestellten Arbeits-Referenzmaterials
CommitteeCII/60
ISBN978 0 580 55764 4
PublisherBSI
FormatA4
DeliveryYes
Pages30
File Size388 KB
Price£186.00


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