Status : Revised, Superseded, Withdrawn Published : February 2006 Replaced By : BS EN 62276:2013
Provides specifications for manufacturing piezoelectric single crystal wafers to be used in surface acoustic wave devices. Applies to the manufacture of synthetic quartz, lithium niobate, lithium tantalate, lithium tetraborate, and lanthanum gallium silicate single crystal wafers intended for use as substrates in the manufacture of surface acoustic wave filters and resonators.
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