BS EN 62047-1:2006 - Semiconductor devices. Micro-electromechanical devices. Terms and definitions

BS EN 62047-1:2006

Semiconductor devices. Micro-electromechanical devices. Terms and definitions

Status : Revised, Superseded, Withdrawn   Published : September 2006 Replaced By : BS EN 62047-1:2016

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This part of IEC 62047 defines terms for micro-electromechanical devices including the process of production of such devices.




Standard NumberBS EN 62047-1:2006
TitleSemiconductor devices. Micro-electromechanical devices. Terms and definitions
StatusRevised, Superseded, Withdrawn
Publication Date29 September 2006
Withdrawn Date30 April 2016
Normative References(Required to achieve compliance to this standard)No other standards are normatively referenced
Informative References(Provided for Information)No other standards are informatively referenced
Replaced ByBS EN 62047-1:2016
International RelationshipsIEC 62047-1:2005,EN 62047-1:2006,EN 61223-3-1:1999
Draft Superseded By03/107914 DC
DescriptorsSemiconductor devices, Vocabulary, Integrated circuits, Electronic equipment and components, Semiconductor technology, Electromechanical devices, Terminology
ICS01.040.31
31.080.99
Title in FrenchDispositifs a semiconducteurs. Dispositifs microelectromecaniques. Termes et definitions
Title in GermanHalbleiterbauelemente. Bauteile der Mikrosystemtechnik. Begriffe und Definitionen
CommitteeEPL/47
ISBN0 580 49123 4
PublisherBSI
FormatA4
DeliveryNo
Pages28
File Size802 KB
Price£182.00


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