BS EN ISO 14644-8:2013 - Cleanrooms and associated controlled environments. Classification of air cleanliness by chemical concentration (ACC)

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BS EN ISO 14644-8:2013

Cleanrooms and associated controlled environments. Classification of air cleanliness by chemical concentration (ACC)

Status : Current, Under review   Published : February 2013

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Standard NumberBS EN ISO 14644-8:2013
TitleCleanrooms and associated controlled environments. Classification of air cleanliness by chemical concentration (ACC)
StatusCurrent, Under review
Publication Date28 February 2013
Cross ReferencesISO 14644-6, ISO 14644-4:2001, ISO 14644-5:2004, ISO 14644-7:2004, ISO 14698, SEMI F21-1102, IEST-G-CC035.1, ASTM D5127-99, JACA No. 34-:2000, JACA No. 35A-2003, JACA No. 43-2006, SEMI E108-0307, IEST-RP-CC031.2, IDEMA Standard M11-99, JIS B9917-8:2010, SEMI E45-1101, SEMI E460307
ReplacesBS EN ISO 14644-8:2006
International RelationshipsEN ISO 14644-8:2013,ISO 14644-8:2013
Draft Superseded By11/30248115 DC
DescriptorsEnvironmental cleanliness, Classification systems, Environment (working), Sampling methods, Verification, Concentration, Designations, Chemical analysis and testing, Air pollution, Contamination, Clean rooms, Air, Molecules, Test equipment
ICS13.040.35
Title in FrenchSalles propres et environnements maîtrisés apparentés. Classification de la propreté chimique de l'air
Title in GermanReinräume und zugehörige Reinraumbereiche. Klassifizierung der Luftreinheit anhand der Chemikalienkonzentration (ACC)
CommitteeLBI/30
ISBN978 0 580 75693 1
PublisherBSI
FormatA4
DeliveryYes
Pages32
File Size1.037 MB
Price£198.00


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