ASTM E2734/E2734M - 10 - Standard Specification for Dimensions of Knife-Edge Flanges

ASTM E2734/E2734M - 10

Standard Specification for Dimensions of Knife-Edge Flanges

Status : Current, Superseded   Published : June 2010 Replaced By : ASTM E2734/E2734M - 10(2018)



1.1 This standard specifies the dimensions of knife-edge style flanges and their associated gaskets used in vacuum systems for pressures ranging from 10 5 Pa to 10 -11 Pa. Such flanges are widely used throughout vacuum technology applications in semiconductor processing tools, surface analysis systems, space simulation systems, and general research requiring vacuum.

1.2 The values stated in either SI units or inch-pound units are to be regarded separately as standard. The values stated in each system may not be exact equivalents; therefore, each system shall be used independently of the other. Combining values from the two systems may result in non-conformance with the standard.

1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Standard NumberASTM E2734/E2734M - 10
TitleStandard Specification for Dimensions of Knife-Edge Flanges
StatusCurrent, Superseded
Publication Date10 June 2010
Normative References(Required to achieve compliance to this standard)No other standards are normatively referenced
Informative References(Provided for Information)No other standards are informatively referenced
Replaced ByASTM E2734/E2734M - 10(2018)
Descriptors Flange, Rotatable flange, Vacuum seal, Gasket, Knife-edge, Vacuum hardware, Metal seal, Vacuum fitting, Metal gasket, Outgassing
File Size168 KB

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