BS EN ISO 14644-9:2012 - Cleanrooms and associated controlled environments. Classification of surface cleanliness by particle concentration

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BS EN ISO 14644-9:2012

Cleanrooms and associated controlled environments. Classification of surface cleanliness by particle concentration

Status : Current, Under review   Published : August 2012

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Standard NumberBS EN ISO 14644-9:2012
TitleCleanrooms and associated controlled environments. Classification of surface cleanliness by particle concentration
StatusCurrent, Under review
Publication Date31 August 2012
Cross ReferencesISO 14644-6:2007, ISO 4287:1997, ISO 4288:1996, ISO 5725-2:1994, ISO 10015:1999, ISO 10576-1:2003, ISO 16232-2:2007, ISO 16232-3:2007, ISO 16232-4:2007, ISO 16232-5:2007, ISO/TS 21748:2004, IEC 61340-5-1:2007, ASTM E18-07, ASTM E1216-06, ASTM F312-08, ASTM F24-09, ASTM F303-08, CLC/TR 61340-5-2:2008, IEST-RP-CC022.2-2004, IEST-STD-CC1246D, SEMI E43-0301, SEMI E78-0706
International RelationshipsEN ISO 14644-9:2012,ISO 14644-9:2012
Draft Superseded By08/30190157 DC
DescriptorsEnvironmental cleanliness, Contamination, Molecules, Clean rooms, Surfaces, Environment (working), Chemical analysis and testing, Cleaning equipment
ICS13.040.35
Title in FrenchSalles propres et environnements maîtrisés apparentés. Classification de la propreté des surfaces par la concentration de particules
Title in GermanReinräume und zugehörige Reinraumbereiche. Klassifzierung der partikulären Oberflächenreinheit
CommitteeLBI/30
ISBN978 0 580 64583 9
PublisherBSI
FormatA4
DeliveryYes
Pages34
File Size681 KB
Price£198.00


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