BS EN ISO 14644-3:2005 - Cleanrooms and associated controlled environments. Test methods – BSI British Standards
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BS EN ISO 14644-3:2005

Cleanrooms and associated controlled environments. Test methods

Status : Current, Under review   Published : December 2005



BS EN ISO 14644-3 sets out test methods that may be used for the purpose of characterizing a cleanroom as described and specified in other parts of BS EN ISO 14644.

Statements in this part of ISO 14644 reference the standards of ASTM, CEN, DIN, IEST, JACA, JIS and SEMI.

Part 3 of BS EN ISO 14644 specifies test methods for designated classification of airborne particulate cleanliness and for characterizing the performance of cleanrooms and clean zones. 

Performance tests are specified for two types of cleanrooms and clean zones: those with unidirectional flow and those with non-unidirectional flow, in three possible occupancy states: as-built, at-rest and operational.

The test methods recommend test apparatus and test procedures for determining performance parameters. Where the test method is affected by the type of cleanroom or clean zone, alternative procedures are suggested. For some of the tests, several different methods and apparatus are recommended to accommodate different end-use considerations.

Alternative methods not included in this part of BS EN ISO 14644 may be used if based on agreement between customer and supplier. Alternative methods do not necessarily provide equivalent measurements.

This part of ISO 14644 is not applicable to the measurement of products or of processes in cleanrooms or separative devices.

Not all cleanroom parameter test procedures are shown in this part of ISO 14644. The procedures and apparatus to characterize other parameters, of concern in cleanrooms and clean zones used for specific products or processes, are discussed elsewhere in other documents [for example, procedures for control and measurement of viable materials (BS EN ISO 14698), testing cleanroom functionality (BS EN ISO 14644-4), and testing of separative devices (BS EN ISO 14644-7). In addition, other standards can be considered to be applicable.

See other standards in the BS EN ISO 14664 series.

Standard NumberBS EN ISO 14644-3:2005
TitleCleanrooms and associated controlled environments. Test methods
StatusCurrent, Under review
Publication Date20 December 2005
Cross ReferencesISO 7726:1998, ISO 14644-1:1999, ISO 14644-2:2000, ISO 14644-4:2001, ASME N510-1989, ASTM F24-00, ASTM F50-92, ASTM F312-97, ASTM F328-98, ASTM F1471-93, EN 1822-2:1998, EN 1822-4:2000, EN 12599:2000, IEST-G-CC1001:1999, IEST-G-CC1002:1999, IEST-G-CC1003:1999, IEST-RP-CC001.3:1993, IEST-RP-CC006.3:2004, IEST-RP-CC007.1:1992, IEST-RP-CC021.1:1993, IEST-RP-CC034.2:1999, ISO 5167-1:2003, ISO 5167-2:2003, ISO 5167-3:2003, ISO 5167-4:2003, JACA 24:1989, JIS B 9921:1997, SEMI E14-93, VDI 2083 Part 4:1996
International RelationshipsEN ISO 14644-3:2005,ISO 14644-3:2005
Draft Superseded By02/123800 DC
DescriptorsEnvironment (working), Filtration, Air cleaning equipment, Particle size distribution, Testing conditions, Clean rooms, Particulate air pollutants, Performance testing, Environmental cleanliness, Air filters
Title in FrenchSalles propres et environnements maitrises apparentes. Methodes d'essai
Title in GermanReinraeume und zugehoerige Reinraumbereiche. Pruefverfahren
ISBN0 580 47150 0
File Size1.598 MB

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